@misc{indiciaeb67051a60377, title = {Autonomous epitaxial atomic-layer synthesis via real-time computer vision of electron diffraction}, author = {Haotong Liang and Yunlong Sun and Ryan Paxson and Chih-Yu Lee and Alex T. Hall and Zoey Warecki and John Cumings and Hideomi Koinuma and Aaron Gilad Kusne and Mikk Lippmaa and Ichiro Takeuchi}, year = {2026}, url = {https://arxiv.org/abs/2602.20432}, note = {Source identifier: 2602.20432} }