@misc{indiciae7d59f02c8f1d, title = {SegSEM: Enabling and Enhancing SAM2 for SEM Contour Extraction}, author = {Da Chen and Guangyu Hu and Kaihong Xu and Kaichao Liang and Songjiang Li and Wei Yang and XiangYu Wen and Mingxuan Yuan}, year = {2026}, url = {https://arxiv.org/abs/2602.20471}, note = {Source identifier: 2602.20471} }