@misc{indiciaed0066000cfd2,
  title = {Integrating Domain-Specialized Language Models with AI Measurement Tools for Deterministic Atomic-Resolution Experimentation},
  author = {Zhuo Diao and Kouma Matsumoto and Linfeng Hou and Masahiro Ohara and Hayato Yamashita and Masayuki Abe},
  year = {2026},
  url = {https://arxiv.org/abs/2602.20669},
  note = {Source identifier: 2602.20669}
}