@misc{indiciae42eb63786f78, title = {Interpretable self-driving sputter epitaxy: from black-box optimization to human-usable growth rules}, author = {Yuki K. Wakabayashi and Yui Ogawa and Franz Benedict Romero and Takuma Otsuka and Yoshitaka Taniyasu}, year = {2026}, doi = {10.1038/s41467-026-76533-0}, url = {https://arxiv.org/abs/2602.22531}, note = {Source identifier: 2602.22531} }