TY  - RPRT
TI  - Interpretable self-driving sputter epitaxy: from black-box optimization to human-usable growth rules
AU  - Yuki K. Wakabayashi
AU  - Yui Ogawa
AU  - Franz Benedict Romero
AU  - Takuma Otsuka
AU  - Yoshitaka Taniyasu
PY  - 2026
DO  - 10.1038/s41467-026-76533-0
UR  - https://arxiv.org/abs/2602.22531
ID  - 2602.22531
ER  -