@misc{indiciaed0ac1b672b26,
  title = {SPM-Bench: Benchmarking Large Language Models for Scanning Probe Microscopy},
  author = {Peiyao Xiao and Xiaogang Li and Xinyi Gao and Chengliang Xu and Ben Wang and Zichao Chen and Zeyu Wang and Lin Qu and Bing Zhao and Hu Wei},
  year = {2026},
  url = {https://arxiv.org/abs/2602.22971},
  note = {Source identifier: 2602.22971}
}