@misc{indiciae6eeb6583cb9e, title = {Titanic overconfidence -- dark uncertainty can sink hybrid metrology for semiconductor manufacturing}, author = {Ronald G. Dixson and Adam L. Pintar and R. Joseph. Kline and Thomas A. Germer and J. Alexander Liddle and John S. Villarrubia and Samuel M. Stavis}, year = {2026}, url = {https://arxiv.org/abs/2602.23131}, note = {Source identifier: 2602.23131} }