TY  - RPRT
TI  - Titanic overconfidence -- dark uncertainty can sink hybrid metrology for semiconductor manufacturing
AU  - Ronald G. Dixson
AU  - Adam L. Pintar
AU  - R. Joseph. Kline
AU  - Thomas A. Germer
AU  - J. Alexander Liddle
AU  - John S. Villarrubia
AU  - Samuel M. Stavis
PY  - 2026
UR  - https://arxiv.org/abs/2602.23131
ID  - 2602.23131
ER  -