@misc{indiciae03a7f5624e6a,
  title = {Optimizing CMOS-compatible, superconducting titanium nitride resonators: Deposition conditions and structuring processes},
  author = {Simon J. K. Lang and Alexandra Schewski and Ignaz Eisele and Johannes Weber and Carla Moran-Guizan and Zhen Lou and Moritz Singer and Benedikt Schoof and Marc Tornow and Thomas Mayer and Daniela Zahn and Rui N. Pereira and Christoph Kutter},
  year = {2026},
  doi = {10.1063/5.0331943},
  url = {https://arxiv.org/abs/2603.00441},
  note = {Source identifier: 2603.00441}
}