@misc{indiciaec193347d77d1, title = {4-Pixel NbN Hot-Electron Bolometer Integrated in a Si\$\_3\$N\$\_4\$ Planar Optical Waveguide with On-Chip Fiber-Alignment Trench}, author = {N. A. Vovk and G. A. Matveev and M. A. Mumlyakov and M. V. Shibalov and I. A. Filippov and I. D. Burkov and S. D. Perov and N. V. Porohov and N. N. Osipov and M. A. Tarkhov}, year = {2026}, url = {https://arxiv.org/abs/2603.01676}, note = {Source identifier: 2603.01676} }