@misc{indiciaefe3090b691ca,
  title = {High-Stress Si3N4 Reflective Membranes Monolithically Integrated with Cavity Bragg Mirrors},
  author = {Megha Khokhar and Lucas Norder and Paolo M. Sberna and Richard A. Norte},
  year = {2026},
  url = {https://arxiv.org/abs/2603.02490},
  note = {Source identifier: 2603.02490}
}