TY  - RPRT
TI  - High-Stress Si3N4 Reflective Membranes Monolithically Integrated with Cavity Bragg Mirrors
AU  - Megha Khokhar
AU  - Lucas Norder
AU  - Paolo M. Sberna
AU  - Richard A. Norte
PY  - 2026
UR  - https://arxiv.org/abs/2603.02490
ID  - 2603.02490
ER  -