@misc{indiciae7c34210af2ab,
  title = {Study on the Effect of Annealing on Ga\$\_2\$O\$\_3\$ Thin Films Deposited on Silicon by RF Sputtering},
  author = {Ana Sofia Sousa and Duarte M. Esteves and Tiago T. Robalo and Mário S. Rodrigues and Katharina Lorenz and Marco Peres},
  year = {2026},
  url = {https://arxiv.org/abs/2603.04327},
  note = {Source identifier: 2603.04327}
}