@misc{indiciae86b48045879e, title = {Temperature-Dependent Dielectric Function of Tantalum Nitride Formed by Atomic Layer Deposition for Tunnel Barriers in Josephson Junctions}, author = {Ekta Bhatia and Aaron Lopez Gonzalez and Yoshitha Hettige and Tuan Vo and Sandra Schujman and Kevin Musick and Thomas Murray and Kim Kisslinger and Chenyu Zhou and Mingzhao Liu and Satyavolu S. Papa Rao and Stefan Zollner}, year = {2026}, doi = {10.1116/5.0333748}, url = {https://arxiv.org/abs/2603.05383}, note = {Source identifier: 2603.05383} }