@misc{indiciae3e654cc9c56a,
  title = {Unlocking extreme doping and strain in epitaxial monocrystalline silicon},
  author = {Léonard Desvignes and Dominique Débarre and Ludovic Largeau and Géraldine Hallais and Gilles Patriarche and Giacomo Priante and Eric Ngo and Olivia Mauguin and Alberto Debernardi and Bernard Sermage and Francesca Chiodi},
  year = {2026},
  url = {https://arxiv.org/abs/2603.06383},
  note = {Source identifier: 2603.06383}
}