@misc{indiciae38757f9ce520,
  title = {High Thermal Conductivity in Back-End-of-Line Compatible AlN Thin Films},
  author = {Xufei Guo and Zirou Chen and Zifeng Huang and Yuxiang Wang and Jinwen Liu and Zhe Cheng},
  year = {2026},
  url = {https://arxiv.org/abs/2603.07115},
  note = {Source identifier: 2603.07115}
}