@misc{indiciaef5ce27f89291,
  title = {Anisotropic implantation damage build-up and crystal recovery in \$β\$-Ga\$\_2\$O\$\_3\$},
  author = {Duarte Magalhães Esteves and Sérgio Magalhães and Ângelo Rafael Granadeiro da Costa and Katharina Lorenz and Marco Peres},
  year = {2026},
  doi = {10.1016/j.nimb.2026.166157},
  url = {https://arxiv.org/abs/2603.08534},
  note = {Source identifier: 2603.08534}
}