TY  - RPRT
TI  - Anisotropic implantation damage build-up and crystal recovery in $β$-Ga$_2$O$_3$
AU  - Duarte Magalhães Esteves
AU  - Sérgio Magalhães
AU  - Ângelo Rafael Granadeiro da Costa
AU  - Katharina Lorenz
AU  - Marco Peres
PY  - 2026
DO  - 10.1016/j.nimb.2026.166157
UR  - https://arxiv.org/abs/2603.08534
ID  - 2603.08534
ER  -