@misc{indiciae4977c169567b,
  title = {Atomic-Scale Mechanisms of SiO\$\_2\$ Plasma-Enhanced Chemical Vapor Deposition Revealed by Molecular Dynamics with a Machine-Learning Interatomic Potential},
  author = {Jaehoon Kim and Minseok Moon and Hyunsung Cho and Hyeon-Deuk Kim and Rokyeon Kim and Gyehyun Park and Seungwu Han and Youngho Kang},
  year = {2026},
  url = {https://arxiv.org/abs/2603.11416},
  note = {Source identifier: 2603.11416}
}