@misc{indiciae630abfbbb83a, title = {Gen-Fab: A Variation-Aware Generative Model for Predicting Fabrication Variations in Nanophotonic Devices}, author = {Rambod Azimi and Yuri Grinberg and Dan-Xia Xu and Odile Liboiron-Ladouceur}, year = {2026}, doi = {10.1007/s00158-026-04272-3}, url = {https://arxiv.org/abs/2603.11505}, note = {Source identifier: 2603.11505} }