@misc{indiciae84fb431b09f0, title = {RF magnetron sputtering deposition of multilayers optical filters for ultra-broadband applications with a large number of thin layers}, author = {Maxime Duris and Bryan Horcholle and Cédric Frilay and C. Labbe and Xavier Portier and Philippe Marie and Sylvain Duprey and Franck Lemarié and Julien Cardin}, year = {2026}, url = {https://arxiv.org/abs/2603.12814}, note = {Source identifier: 2603.12814} }