@misc{indiciaed5c09b1953e8,
  title = {Evaluation of polymer-metal-hybrid bonded wafer-stacks and sensor wafers for ultra-thin hybrid silicon detectors},
  author = {Janna Zoe Vischer and Yannick Dieter and Jochen Dingfelder and Thomas Fritzsch and Fabian Hügging and Kevin Kröninger and Maximilian Mucha and Matthias Schüssler and Jens Weingarten},
  year = {2026},
  url = {https://arxiv.org/abs/2603.13992},
  note = {Source identifier: 2603.13992}
}