@misc{indiciae0d6c7baf51b3, title = {Quantum-limited traveling-wave parametric amplifier based on DUV-defined planar structures}, author = {Hao Li and Marco Scigliuzzo and Evgenii Guzovskii and Seog-Tae Han and Kyungho Han and Tobias J. Kippenberg}, year = {2026}, url = {https://arxiv.org/abs/2603.14455}, note = {Source identifier: 2603.14455} }