TY - RPRT TI - Quantum-limited traveling-wave parametric amplifier based on DUV-defined planar structures AU - Hao Li AU - Marco Scigliuzzo AU - Evgenii Guzovskii AU - Seog-Tae Han AU - Kyungho Han AU - Tobias J. Kippenberg PY - 2026 UR - https://arxiv.org/abs/2603.14455 ID - 2603.14455 ER -