@misc{indiciaea5ef91d4e0b4,
  title = {Physics-Informed Neural Systems for the Simulation of EUV Electromagnetic Wave Diffraction from a Lithography Mask},
  author = {Vasiliy A. Es'kin and Egor V. Ivanov},
  year = {2026},
  url = {https://arxiv.org/abs/2603.15584},
  note = {Source identifier: 2603.15584}
}