TY  - RPRT
TI  - Physics-Informed Neural Systems for the Simulation of EUV Electromagnetic Wave Diffraction from a Lithography Mask
AU  - Vasiliy A. Es'kin
AU  - Egor V. Ivanov
PY  - 2026
UR  - https://arxiv.org/abs/2603.15584
ID  - 2603.15584
ER  -