@misc{indiciae09c74bbaf655, title = {A Novel Approach for Fault Detection and Failure Analysis of CMOS Copper Metal Stacks}, author = {Gregor Hieronymus Eberwein and Gianluca Aglieri Rinella and Daniela Bortoletto and Szymon Bugiel and Francesca Carnesecchi and Antonello Di Mauro and Pedro Vicente Leitao and Hartmut Hillemanns and Marc Alain Imhoff and Antoine Junique and Alex Kluge and Magnus Mager and Paolo Martinengo and Iaroslav Panasenko and Ivan Ravasenga and Felix Reidt and Valerio Sarritzu and Walter Snoeys and Miljenko Šuljić}, year = {2026}, doi = {10.1109/tns.2026.3671605}, url = {https://arxiv.org/abs/2603.16473}, note = {Source identifier: 2603.16473} }