@misc{indiciae7129ffc62a9a, title = {SAMSEM -- A Generic and Scalable Approach for IC Metal Line Segmentation}, author = {Christian Gehrmann and Jonas Ricker and Simon Damm and Deruo Cheng and Julian Speith and Yiqiong Shi and Asja Fischer and Christof Paar}, year = {2026}, doi = {10.46586/tches.v2026.i3.122-146}, url = {https://arxiv.org/abs/2603.16548}, note = {Source identifier: 2603.16548} }