@misc{indiciae332034750b8b,
  title = {Nanostructuring SiC by sequential plasma oxidation and reactive ion etching},
  author = {Joonas Isometsä and Auguste Bieleviciute and Xiaolong Liu and Ville Vähänissi and Hele Savin},
  year = {2026},
  url = {https://arxiv.org/abs/2603.16589},
  note = {Source identifier: 2603.16589}
}