TY  - RPRT
TI  - Nanostructuring SiC by sequential plasma oxidation and reactive ion etching
AU  - Joonas Isometsä
AU  - Auguste Bieleviciute
AU  - Xiaolong Liu
AU  - Ville Vähänissi
AU  - Hele Savin
PY  - 2026
UR  - https://arxiv.org/abs/2603.16589
ID  - 2603.16589
ER  -