@misc{indiciae63d04be3a655, title = {Single-Crystal AlN Wafer-Based Bulk Acoustic Resonators for Piezoelectric Power Conversion}, author = {Ziqian Yao and Clarissa Daniel and Kaicheng Pan and Tzu-Hsuan Hsu and Heather Chang and Mark S Goorsky and Juan Rivas-Davila and Ruochen Lu}, year = {2026}, url = {https://arxiv.org/abs/2603.19409}, note = {Source identifier: 2603.19409} }