@misc{indiciaec4239d8bca04,
  title = {First Plasma Atomic Layer Etching of Diamond via O\$\_2\$/Kr Chemistry},
  author = {Duc Duy Tran and Cedric Mannequin and Aboulaye Traore and Masahiro Sasaki and Etienne Gheeraert},
  year = {2026},
  url = {https://arxiv.org/abs/2603.21159},
  note = {Source identifier: 2603.21159}
}