@misc{indiciaeb4814d55e524,
  title = {Small-Data Machine Learning Uncovers Decoupled Control Mechanisms of Crystallinity and Surface Morphology in \$β\$-Ga2O3 Epitaxy},
  author = {Min Peng and Yuanjun Tang and Dianmeng Dong and Yang Zhang and Cheng Wang and Shulin Jiao and Xiaotong Ma and Shichao Zhang and Jingchen Wang and Huiying Wang and Yongxin Zhang and Huiping Zhu and Yue-Wen Fang and Fan Zhang and Zhenping Wu},
  year = {2026},
  doi = {10.1016/j.apsusc.2026.168118},
  url = {https://arxiv.org/abs/2603.21814},
  note = {Source identifier: 2603.21814}
}