@misc{indiciae51a30cba0794, title = {Self-Heating and Parasitic Effects in Multi-Tier CFET Design}, author = {Sufia Shahin and Mahdi Benkhelifa and Yogesh Singh Chauhan and Hussam Amrouch}, year = {2026}, url = {https://arxiv.org/abs/2603.21910}, note = {Source identifier: 2603.21910} }