@misc{indiciaed1ad4c4faf3b,
  title = {Wafer-to-Wafer Bonding: Part: I -- The Coupled Physics Problem and the 2D Finite Element Implementation},
  author = {Kamalendu Ghosh and Bhavesh Shrimali and Subin Jeong},
  year = {2026},
  url = {https://arxiv.org/abs/2603.22827},
  note = {Source identifier: 2603.22827}
}