TY  - RPRT
TI  - Wafer-to-Wafer Bonding: Part: I -- The Coupled Physics Problem and the 2D Finite Element Implementation
AU  - Kamalendu Ghosh
AU  - Bhavesh Shrimali
AU  - Subin Jeong
PY  - 2026
UR  - https://arxiv.org/abs/2603.22827
ID  - 2603.22827
ER  -