@misc{indiciae6e7b4326c31d, title = {Single-Step Grayscale Lithography of Multi-Depth Mie Void Metasurfaces}, author = {Oren Goldberg and Noa Mazurski and Uriel Levy}, year = {2026}, url = {https://arxiv.org/abs/2603.27574}, note = {Source identifier: 2603.27574} }