@misc{indiciae79b6b673ac64,
  title = {Maskless Electron Beam-Induced Etching of Diamond in Air: A Secondary Electron-Driven Mechanism},
  author = {Duc-Duy Tran and Cedric Mannequin and Fabrice Donatini and Masahiro Sasaki and Etienne Gheeraert},
  year = {2026},
  url = {https://arxiv.org/abs/2603.28180},
  note = {Source identifier: 2603.28180}
}