TY  - RPRT
TI  - Maskless Electron Beam-Induced Etching of Diamond in Air: A Secondary Electron-Driven Mechanism
AU  - Duc-Duy Tran
AU  - Cedric Mannequin
AU  - Fabrice Donatini
AU  - Masahiro Sasaki
AU  - Etienne Gheeraert
PY  - 2026
UR  - https://arxiv.org/abs/2603.28180
ID  - 2603.28180
ER  -