@misc{indiciaee31c326837ac,
  title = {Oxide-Nitride Heteroepitaxy for Low-Loss Dielectrics in Superconducting Quantum Circuits},
  author = {David A. Garcia-Wetten and Mitchell J. Walker and Peter G. Lim and André Vallières and Maria G. Jimenez-Guillermo and Miguel A. Alvarado and Dominic P. Goronzy and Anna Grassellino and Jens Koch and Vinayak P. Dravid and Mark C. Hersam and Michael J. Bedzyk},
  year = {2026},
  doi = {10.1021/acsnano.6c09621},
  url = {https://arxiv.org/abs/2603.29065},
  note = {Source identifier: 2603.29065}
}