@misc{indiciaef093d02377af, title = {Inverse Design of Optical Multilayer Thin Films using Robust Masked Diffusion Models}, author = {Jonas Schaible and Asena Karolin Özdemir and Charlotte Debus and Sven Burger and Achim Streit and Christiane Becker and Klaus Jäger and Markus Götz}, year = {2026}, url = {https://arxiv.org/abs/2604.01106}, note = {Source identifier: 2604.01106} }