@misc{indiciaefb21c8ca7681,
  title = {Ion-neutral and neutral-neutral scattering in argon at KeV energies and implications for high-aspect-ratio etching},
  author = {Alexander V. Khrabrov and Igor D. Kaganovich},
  year = {2026},
  url = {https://arxiv.org/abs/2604.04214},
  note = {Source identifier: 2604.04214}
}