TY  - RPRT
TI  - Ion-neutral and neutral-neutral scattering in argon at KeV energies and implications for high-aspect-ratio etching
AU  - Alexander V. Khrabrov
AU  - Igor D. Kaganovich
PY  - 2026
UR  - https://arxiv.org/abs/2604.04214
ID  - 2604.04214
ER  -