@misc{indiciae2cf21136473a, title = {Grafted Low-Leakage Si/AlN p-n Diodes Enabled by Fluorinated AlN Interface}, author = {Yi Lu and Tsung-Han Tsai and Qingxiao Wang and Haicheng Cao and Jie Zhou and You Jin Koo and Chenyu Wang and Yang Liu and Yueyue Hao and Michael Eller and Connor Bailey and Stephanie Liu and Nicholas J. Tanen and Zhiyuan Liu and Mingtao Nong and Robert M. Jacobberger and Tien Khee Ng and Katherine Fountaine and Vincent Gambin and Boon S. Ooi and Xiaohang Li and Zhenqiang Ma}, year = {2026}, url = {https://arxiv.org/abs/2604.06359}, note = {Source identifier: 2604.06359} }