@misc{indiciae1cd6167c6438,
  title = {Resist-free shadow deposition using silicon trenches for Josephson junctions in superconducting qubits},
  author = {Tathagata Banerjee and Stephen Daniel Funni and Saswata Roy and Judy J. Cha and Valla Fatemi},
  year = {2026},
  url = {https://arxiv.org/abs/2604.09796},
  note = {Source identifier: 2604.09796}
}