TY  - RPRT
TI  - Resist-free shadow deposition using silicon trenches for Josephson junctions in superconducting qubits
AU  - Tathagata Banerjee
AU  - Stephen Daniel Funni
AU  - Saswata Roy
AU  - Judy J. Cha
AU  - Valla Fatemi
PY  - 2026
UR  - https://arxiv.org/abs/2604.09796
ID  - 2604.09796
ER  -