@misc{indiciaeaac2c9900968, title = {CapBench: A Multi-PDK Dataset for Machine-Learning-Based Post-Layout Capacitance Extraction}, author = {Hector R. Rodriguez and Jiechen Huang and Wenjian Yu}, year = {2026}, doi = {10.1145/3770743.3804116}, url = {https://arxiv.org/abs/2604.11202}, note = {Source identifier: 2604.11202} }