@misc{indiciae077e74e137da, title = {From GDSII to Wafer: EDA Design Flow and Data Conversion for Wafer-Scale Manufacturing of Superconducting Quantum Chips}, author = {Ling Qiao and Fumin Luo and Qinglang Guo}, year = {2026}, url = {https://arxiv.org/abs/2604.11379}, note = {Source identifier: 2604.11379} }