TY  - RPRT
TI  - From GDSII to Wafer: EDA Design Flow and Data Conversion for Wafer-Scale Manufacturing of Superconducting Quantum Chips
AU  - Ling Qiao
AU  - Fumin Luo
AU  - Qinglang Guo
PY  - 2026
UR  - https://arxiv.org/abs/2604.11379
ID  - 2604.11379
ER  -