@misc{indiciaeb918e3212186,
  title = {Building reliable 3D photonic integrated circuits and cavities at the wafer scale},
  author = {Yuhao Huang and Yunqi Fu and Yu Xia and Yuemin Li and Zheng Li and Yaoran Huang and Zhaoting Geng and Mingfei Liu and Chao Xiang},
  year = {2026},
  url = {https://arxiv.org/abs/2604.12889},
  note = {Source identifier: 2604.12889}
}